Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries

Vinsensia Ade Sugiawati; Florence Vacandio; Marielle Eyraud; Philippe Knauth; Thierry Djenizian

doi:10.1186/s11671-016-1574-7

Porous NASICON-Type Li3Fe2(PO4)3 Thin Film Deposited by RF Sputtering as Cathode Material for Li-Ion Microbatteries

Nanoscale Res Lett. 2016 Dec;11(1):365. doi: 10.1186/s11671-016-1574-7. Epub 2016 Aug 17.

Authors

Vinsensia Ade Sugiawati¹, Florence Vacandio², Marielle Eyraud¹, Philippe Knauth¹, Thierry Djenizian^{3

4}

Affiliations

¹ Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France.
² Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France. florence.vacandio@univ-amu.fr.
³ Aix-Marseille University, CNRS, MADIRELLaboratory, UMR 7246, 13397, Marseille, France. thierry.djenizian@univ-amu.fr.
⁴ Department of Flexible Electronics, Ecole National Supérieure des Mines de Saint-Etienne, Center of Microelectronics in Provence, 13 541, Gardanne, France. thierry.djenizian@univ-amu.fr.

Abstract

We report the electrochemical performance of porous NASICON-type Li3Fe2(PO4)3 thin films to be used as a cathode for Li-ion microbatteries. Crystalline porous NASICON-type Li3Fe2(PO4)3 layers were obtained by radio frequency sputtering with an annealing treatment. The thin films were characterized by XRD, SEM, and electrochemical techniques. The chronoamperometry experiments showed that a discharge capacity of 88 mAhg(-1) (23 μAhcm(-2)) is attained for the first cycle at C/10 to reach 65 mAhg(-1) (17 μAhcm(-2)) after 10 cycles with a good stability over 40 cycles.

Keywords: Cathode thin film; Li-ion microbatteries; NASICON-type Li3Fe2(PO4)3; Radio frequency sputtering.