ITO glass is a substrate often utilized to construct various IT devices and sensors, favored for its excellent characteristics such as rapid electron transfer kinetics, non-toxicity, chemical stability, and high electron transmission. In this paper, film with ZnO-modified nanostructures on ITO glass was fabricated by both electrochemical deposition and hydrothermal deposition, respectively. The ZnO film as-deposited was then modified by surface modification reagent (FOTMS) to obtain a hydrophobic surface. SEM, XRD, and ZYGO were used to characterize their properties. The contact angles were then measured to characterize and compare the wettability of non-modified ITO glass and ITO glass modified by zinc oxide films.