Piezoelectric dynamometers are out of use in high humidity. Experimental results showed that piezoelectric coefficients measured by the force-induced charges method initially fluctuated in a small range and then was unstable, and they could not be measured at high relative humidity (RH). The traditional shielding method-insulation paste was not quiet convenient, and it even added the weight of piezoelectric dynamometers. In this paper, a novel strategy that eliminates the influence of water adsorption with quartz surfaces on piezoelectric dynamometers was proposed. First, a water-quartz model was developed to analyze the origin of the RH effect. In the model, water vapor, which was adsorbed by the quartz sheet side surface, was considered. Second, equivalent sheet resistor of the side surface was researched, while the relationship of the three R's (Roughness, RH, and Resistor) was respectively discussed based on the adsorption mechanism. Finally, fluorination technology was skillfully adapted to each surface of quartz sheets to shield the water vapor. The experiment verified the fluorination strategy and made piezoelectric dynamometers work in high humidity up to 90%RH successfully. The results showed that the presented model above was reasonable. In addition, these observations also drew some useful insights to change the structure of piezoelectric dynamometers and improve the properties.
Keywords: adsorption of water; fluorination; piezoelectric quartz crystals; roughness; sheet resistance.