Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer

Anal Chem. 2016 Jul 5;88(13):6662-5. doi: 10.1021/acs.analchem.6b02085. Epub 2016 Jun 21.

Abstract

We manufactured and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concentrations using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calculated to be 0.033 CO2 vol % while the limit of quantification was calculated to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concentrations close to those in flue gas can also be measured using dilution with inert gas.

Publication types

  • Research Support, Non-U.S. Gov't
  • Letter