Carbonaceous particles are an important component of the atmospheric aerosol particles and important for global climate change, air quality and human health. The PM₁₀ single particles from two environmental monitor locations and seven pollution emission sources were analyzed using scanning proton microprobe (SPM) techniques. The concentration of carbon in individual particles was quantitatively determined by proton non-Rutherford elastic backscattering spectrometry (EBS). The results of this investigation showed that carbonaceous particles were dominant in the pollution sources of coal and oil combustions, diesel busexhaust and automobile exhaust, while inorganic particles were dominant in the sources of steel industry, cement dust and soil dust. Carbonaceous matter was enriched in particles from the city center, while mineral matter was the main component of airborne particles in the industrial area. Elemental mapping of single aerosol particles yielded important information on the chemical reactions of aerosol particles. The micro-PIXE (particle induced X-ray emission) maps of S, Ca and Fe of individual carbonaceous particles showed that sulfuration reaction occurred between SO₂and mineral particles, which increased the sulfur content of particles.