From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices

Adv Mater. 2016 Apr 20;28(15):2956-63. doi: 10.1002/adma.201505929. Epub 2016 Feb 18.

Abstract

Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field.

Keywords: 3D nanostructures; nanogaps; nanoskiving; surface plasmon; surface-enhanced Raman spectroscopy.

Publication types

  • Research Support, Non-U.S. Gov't