Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror

Appl Opt. 2016 Jan 10;55(2):354-9. doi: 10.1364/AO.55.000354.

Abstract

We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ≈600 nm exhibits a continuous period variation of ΔΛ=92 nm across 17 mm width.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Interferometry / methods*
  • Lasers*
  • Microscopy, Electron, Scanning
  • Optical Phenomena*
  • Photography
  • Printing / methods*