Electrically charged selectivity of poly-para-xylylene deposition

Chem Commun (Camb). 2016 Feb 18;52(14):3022-5. doi: 10.1039/c5cc08059b. Epub 2016 Jan 20.

Abstract

The bottom-up patterning approach provides intrinsic advantages associated with unlimited resolution but is limited by the materials available for selection. A general and simple approach towards the selective deposition of poly-para-xylylenes is introduced in this communication. The chemical vapour deposition (CVD) of poly-para-xylylenes is inhibited on the high-energy surfaces of electrically charged conducting substrates. This technology provides an approach to selectively deposit poly-para-xylylenes irrespective of the substituted functionality and to pattern these polymer thin films from the bottom up.

Publication types

  • Research Support, Non-U.S. Gov't