Perovskite hybrid solar cells (pero-HSCs) have drawn great attention in the last 5 years. The efficiencies of pero-HSCs have been boosted from 3.8% to over 20%. However, one of the bottlenecks for commercialization of pero-HSCs is to make a high electrical conductive TiOx electron extraction layer (EEL). In this study, we report high performance pero-HSCs with TiOx EEL, where the TiOx EEL is fabricated by electron beam (e-beam) evaporation, which has been proved to be a well-developed manufacturing process. The resistance of the e-beam evaporated TiOx EEL is smaller than that of sol-gel processed TiOx EEL. Moreover, the dark current densities and interfacial charge carrier recombination of pero-HSCs incorporated with e-beam processed TiOx EEL is also smaller than that of pero-HSCs incorporated with sol-gel processed TiOx EEL. All these result in efficient pero-HSCs with high reproducibility. These results demonstrate that our method provides a simple and facile way to approach high performance pero-HSCs.
Keywords: compact TiOx layer; electron beam evaporation; electron extraction layer; high short circuit current density; perovskite hybrid solar cells.