Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

D B Zolotukhin; A V Tyunkov; Yu G Yushkov; E M Oks

doi:10.1063/1.4937606

Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

Rev Sci Instrum. 2015 Dec;86(12):123301. doi: 10.1063/1.4937606.

Authors

D B Zolotukhin¹, A V Tyunkov¹, Yu G Yushkov¹, E M Oks¹

Affiliation

¹ Tomsk State University of Control Systems and Radioelectronics, 40 Lenin Ave., Tomsk 634050, Russia.

PMID: 26724016
DOI: 10.1063/1.4937606

Abstract

The industrial quadrupole RGA-100 residual gas analyzer was modified for the research of electron beam-generated plasma at forevacuum pressure range. The standard ionizer of the RGA-100 was replaced by three electrode extracting unit. We made the optimization of operation parameters in order to provide the maximum values of measured currents of any ion species. The modified analyzer was successfully tested with beam plasma of argon, nitrogen, oxygen, and hydrocarbons.