Advancing FIB assisted 3D EBSD using a static sample setup

Abstract

A new setup for automatic 3D EBSD data collection in static mode has been developed using a conventional FIB-SEM system. This setup requires no stage or sample movements between the FIB milling and EBSD mapping. Its capabilities were tested experimentally on a coherent twin boundary of an INCONEL sample. Our result demonstrates that this static setup holds many advantages in terms of data throughput and quality as compared with other ones requiring stage/sample movements. The most important advantages are the better slice alignment and an improved orientation precision in 3D space, both being prerequisite for a reliable grain boundary characterization.

Keywords: 3D EBSD; FIB–SEM; Grain boundary; Static setup; Tomography.