Measurement of the permittivity and loss of high-loss materials using a Near-Field Scanning Microwave Microscope

Abstract

In this paper improvements to a Near-Field Scanning Microwave Microscope (NSMM) are presented that allow the loss of high loss dielectric materials to be measured accurately at microwave frequencies. This is demonstrated by measuring polar liquids (loss tangent tanδ≈1) for which traceable data is available. The instrument described uses a wire probe that is electromagnetically coupled to a resonant cavity. An optical beam deflection system is incorporated within the instrument to allow contact mode between samples and the probe tip to be obtained. Liquids are contained in a measurement cell with a window of ultrathin glass. The calibration process for the microscope, which is based on image-charge electrostatic models, has been adapted to use the Laplacian 'complex frequency'. Measurements of the loss tangent of polar liquids that are consistent with reference data were obtained following calibration against single-crystal specimens that have very low loss.

Keywords: Complex frequency; Dielectric measurement; Microwave microscope.