Tungsten Oxide Layers of High Acoustic Impedance for Fully Insulating Acoustic Reflectors

IEEE Trans Ultrason Ferroelectr Freq Control. 2016 Jul;63(7):938-44. doi: 10.1109/TUFFC.2015.2498968. Epub 2015 Nov 9.

Abstract

Gravimetric sensors based on solidly mounted resonators require fully insulating acoustic reflectors to avoid parasitics when operating in liquid media. In this work, we propose a new high-acoustic impedance material, tungsten oxide ([Formula: see text]), for acoustic reflectors. We have optimized the sputtering conditions of [Formula: see text] to obtain nonconductive layers with mass density around [Formula: see text] and acoustic velocities for the shear and the longitudinal modes up to 2700 and 4500 m/s, respectively. Compared to other conventionally used high impedance layers, [Formula: see text] films display several manufacture advantages, such as high deposition rates, great reproducibility, and good adhesion to underlying substrates. We have demonstrated the applicability of [Formula: see text] in practical shear mode bulk acoustic wave resonators that display good performance in liquid environments.