Elastomer polydimethylsiloxane (PDMS) films with embedded in-plane gradient stress are created by making PDMS/(PDMS + silicone oil) crosslinked bilayers and extracting the oil in a suitable organic solvent bath. The collapse of the elastomer after oil extraction generates differential stress in the films that is manifested through their out-of-plane deformation. The curvature κ of narrow stripes of the bilayer, which is composed of layers of approximately equal thicknesses and elasticity moduli, is satisfactorily described by the simple relationship κ = 1.5δH(-1), where δ is the mechanical strain, and H is the total thickness of the bilayer. Curvature mapping of triangular PDMS plates reveals the existence of spherical and cylindrical types of deformation at different locations of the plates. Various 3D-shaped objects can be formed by the self-folding of appropriately designed 2D patterns that are cut from the films, or by nonuniform distribution of the collapsing layer. Thin PDMS bilayers with embedded stress roll up into microtubes of almost perfect cylindrical shape when released in a controlled manner from a substrate.