The quantitative, efficient (Φ = 0.8) photorelease of the fluoride ion upon UV-irradiation in aqueous media is introduced. The 4-hydroxyphenacyl chromophore is simultaneously transformed into UV-transparent 4-hydroxyphenylacetate via a photo-Favorskii rearrangement. The application of this process is demonstrated by photoinduced etching of mica and silicon by AFM.