Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool

Jeffrey Camacho-Bunquin; Heng Shou; Payoli Aich; David R Beaulieu; Helmut Klotzsch; Stephen Bachman; Christopher L Marshall; Adam Hock; Peter Stair

doi:10.1063/1.4928614

Catalyst synthesis and evaluation using an integrated atomic layer deposition synthesis-catalysis testing tool

Rev Sci Instrum. 2015 Aug;86(8):084103. doi: 10.1063/1.4928614.

Authors

Jeffrey Camacho-Bunquin¹, Heng Shou¹, Payoli Aich¹, David R Beaulieu², Helmut Klotzsch², Stephen Bachman², Christopher L Marshall¹, Adam Hock¹, Peter Stair¹

Affiliations

¹ Chemical Sciences and Engineering Division, Argonne National Laboratory, Lemont, Illinois 60439, USA.
² Arradiance Inc., Sudbury, Massachusetts 01776, USA.

PMID: 26329211
DOI: 10.1063/1.4928614

Abstract

An integrated atomic layer deposition synthesis-catalysis (I-ALD-CAT) tool was developed. It combines an ALD manifold in-line with a plug-flow reactor system for the synthesis of supported catalytic materials by ALD and immediate evaluation of catalyst reactivity using gas-phase probe reactions. The I-ALD-CAT delivery system consists of 12 different metal ALD precursor channels, 4 oxidizing or reducing agents, and 4 catalytic reaction feeds to either of the two plug-flow reactors. The system can employ reactor pressures and temperatures in the range of 10(-3) to 1 bar and 300-1000 K, respectively. The instrument is also equipped with a gas chromatograph and a mass spectrometer unit for the detection and quantification of volatile species from ALD and catalytic reactions. In this report, we demonstrate the use of the I-ALD-CAT tool for the synthesis of platinum active sites and Al2O3 overcoats, and evaluation of catalyst propylene hydrogenation activity.