Methodology exploration of specimen preparation for atom probe tomography from nanowires

Jiangtao Qu; Derek Wong; Sichao Du; Limei Yang; Simon Ringer; Rongkun Zheng

doi:10.1016/j.ultramic.2015.06.003

Methodology exploration of specimen preparation for atom probe tomography from nanowires

Ultramicroscopy. 2015 Dec:159 Pt 2:427-31. doi: 10.1016/j.ultramic.2015.06.003. Epub 2015 Jun 17.

Authors

Jiangtao Qu¹, Derek Wong², Sichao Du¹, Limei Yang², Simon Ringer³, Rongkun Zheng⁴

Affiliations

¹ School of Physics, The University of Sydney, New South Wales 2006, Australia.
² Australian Centre for Microscopy & Microanalysis. The University of Sydney, New South Wales 2006, Australia.
³ Australian Centre for Microscopy & Microanalysis. The University of Sydney, New South Wales 2006, Australia; School of Aerospace, Mechanical and Mechatronic Engineering. The University of Sydney, New South Wales 2006, Australia.
⁴ School of Physics, The University of Sydney, New South Wales 2006, Australia. Electronic address: rongkun.zheng@sydney.edu.au.

PMID: 26119926
DOI: 10.1016/j.ultramic.2015.06.003

Abstract

Semiconductor nanowires have been intensively explored for applications in electronics, photonics, energy conversion and storage. A fundamental and quantitative understanding of growth-structure-property relationships is central to applications where nanowires exhibit clear advantages. Atom Probe Tomography (APT) is able to provide 3 dimensional quantitative elemental distributions at atomic-resolution and is therefore unique in understanding the growth-structure-property relationships. However, the specimen preparation with nanowires is extremely challenging. In this paper, two ion beam free specimen preparation methods for APT are presented which are efficient for various nanowires.

Keywords: Atom Probe Tomography; Focus Ion Beam; Nanowires; Specimen preparation.

Publication types

Research Support, Non-U.S. Gov't