Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition

J Vis Exp. 2015 May 15:(99):e52843. doi: 10.3791/52843.

Abstract

Aerosol deposition (AD) is a thick-film deposition process that can produce layers up to several hundred micrometers thick with densities greater than 95% of the bulk. The primary advantage of AD is that the deposition takes place entirely at ambient temperature; thereby enabling film growth in material systems with disparate melting temperatures. This report describes in detail the processing steps for preparing the powder and for performing AD using the custom-built system. Representative characterization results are presented from scanning electron microscopy, profilometry, and ferromagnetic resonance for films grown in this system. As a representative overview of the capabilities of the system, focus is given to a sample produced following the described protocol and system setup. Results indicate that this system can successfully deposit 11 µm thick yttrium iron garnet films that are > 90% of the bulk density during a single 5 min deposition run. A discussion of methods to afford better control of the aerosol and particle selection for improved thickness and roughness variations in the film is provided.

Publication types

  • Research Support, Non-U.S. Gov't
  • Video-Audio Media

MeSH terms

  • Aerosols / chemistry
  • Iron Compounds / chemistry*
  • Microscopy, Electron, Scanning
  • Temperature
  • Yttrium / chemistry*

Substances

  • Aerosols
  • Iron Compounds
  • Yttrium