Titanium dioxide slot waveguides for visible wavelengths

Appl Opt. 2015 Apr 1;54(10):2653-7. doi: 10.1364/AO.54.002653.

Abstract

We present the first, to our knowledge, experimental demonstration of a titanium dioxide slot waveguide operating in the visible range of light. Ring resonators based on slot waveguides were designed, fabricated, and characterized for λ≃650 nm. The fabrication method includes atomic layer deposition, electron beam lithography, and reactive ion etching. The required narrow slot widths of a few tens of nanometers were achieved by using a conformal atomic layer re-coating technique. This unique feature-size-reduction technique was applied after the final etching step.