A flexible ultrasound transducer array with micro-machined bulk PZT

Sensors (Basel). 2015 Jan 23;15(2):2538-47. doi: 10.3390/s150202538.

Abstract

This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ceramics
  • Diagnostic Imaging*
  • Dimethylpolysiloxanes / chemistry
  • Equipment Design
  • Heart / diagnostic imaging*
  • Humans
  • Phantoms, Imaging*
  • Radiography
  • Transducers
  • Ultrasonics

Substances

  • Dimethylpolysiloxanes
  • baysilon