Transmission environmental scanning electron microscope with scintillation gaseous detection device

Ultramicroscopy. 2015 Mar:150:44-53. doi: 10.1016/j.ultramic.2014.11.010. Epub 2014 Dec 5.

Abstract

A transmission environmental scanning electron microscope with use of a scintillation gaseous detection device has been implemented. This corresponds to a transmission scanning electron microscope but with addition of a gaseous environment acting both as environmental and detection medium. A commercial type of low vacuum machine has been employed together with appropriate modifications to the detection configuration. This involves controlled screening of various emitted signals in conjunction with a scintillation gaseous detection device already provided with the machine for regular surface imaging. Dark field and bright field imaging has been obtained along with other detection conditions. With a progressive series of modifications and tests, the theory and practice of a novel type of microscopy is briefly shown now ushering further significant improvements and developments in electron microscopy as a whole.

Keywords: Bright field; Carbon nanotubes; Dark field; ESEM; ESTEM; GDD; Gaseous detection device; TESEM; Transmission environmental scanning electron microscope; wet-ESEM.