Note: development of high speed confocal 3D profilometer

Kar Tien Ang; Zhong Ping Fang; Arthur Tay

doi:10.1063/1.4901518

Note: development of high speed confocal 3D profilometer

Rev Sci Instrum. 2014 Nov;85(11):116103. doi: 10.1063/1.4901518.

Authors

Kar Tien Ang¹, Zhong Ping Fang², Arthur Tay¹

Affiliations

¹ Electrical and Computer Engineering Department, National University of Singapore, 4 Engineering Drive 3, Singapore 117576.
² Singapore Institute of Manufacturing Technology, 71, Nanyang Drive, Singapore 638075.

PMID: 25430152
DOI: 10.1063/1.4901518

Abstract

A high-speed confocal 3D profilometer based on the chromatic confocal technology and spinning Nipkow disk technique has been developed and tested. It can measure a whole surface topography by taking only one image that requires less than 0.3 s. Surface height information is retrieved based on the ratios of red, green, and blue color information. A new vector projection technique has developed to enhance the vertical resolution of the measurement. The measurement accuracy of the prototype system has been verified via different test samples.