The start and evolution of the formation of laser-induced periodic surface structures (LIPSS, ripples) are investigated. The important role of irradiation dose (fluence×number of pulses) for the properties of the generated structures is demonstrated. It is shown how, with an increasing dose, the structures evolve from random surface modification to regular sub-wavelength ripples, then coalesce to broader LIPSS and finally form more complex shapes when ablation produces deep craters. First experiments are presented following this evolution in one single irradiated spot.