The LCOS spatial light modulator (LCOS-SLM) can generate desired multiple spot patterns (MSPs) via the application of suitable computer-generated-holograms (CGHs), but the MSP intensity distribution varies because ambient temperature affects the phase modulation characteristic and causes wavefront distortion. To generate high-optical-quality MSPs we use our hardware-compensated (with a Peltier system to even out phase modulation) and software-corrected (via multiplication of the CGH by temperature correction coefficients) LCOS-SLMs. Experimental results with a 14 × 14 MSP generation show that the hardware-compensated LCOS-SLM provides stable MSPs between 9 to 32 °C. The software-corrected LCOS-SLM provides uniform spots over twice the temperature range obtained with conventional SLM method. We confirm that our methods are highly efficient for use in two-photon excitation microscopy application such as multifocal mulitphoton microscopy.