Near-field imaging and spectroscopy of locally strained GaN using an IR broadband laser

Opt Express. 2014 Sep 22;22(19):22369-81. doi: 10.1364/OE.22.022369.

Abstract

Scattering-type scanning near-field optical microscopy (SNOM) offers the possibility to analyze material properties like strain in crystals at the nanoscale. In this paper we introduce a SNOM setup employing a newly developed tunable broadband laser source with a covered spectral range from 9 µm to 16 µm. This setup allows for the first time optical analyses of the crystal structure of gallium nitride (GaN) at the nanometer scale by excitation of a near-field phonon resonance around 14.5 µm. On the example of an artificially induced stress field within a GaN wafer, we present a method for a 2D visualization of small deviations in the crystal structure, which allows for fast qualitative characterizations. Subsequently, the stress levels at chosen points were quantified by recording complex near-field spectra and correlating them with theoretical model calculations. Applied to the cross-section of a heteroepitaxially grown GaN wafer, we finally demonstrate the capability of our setup to analyze the relaxation of the crystal structure along the growth axis with a nanometer spatial resolution.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Diagnostic Imaging*
  • Equipment Design
  • Gallium / chemistry*
  • Humans
  • Lasers*
  • Light*
  • Microscopy, Atomic Force / instrumentation*
  • Models, Theoretical*
  • Phonons
  • Spectrophotometry, Infrared

Substances

  • gallium nitride
  • Gallium