A novel concept for micromechanical tunable optical filter (TOF) with porous-silicon-based photonic crystals which provide wavelength tuning of ca. ±20% around a working wavelength at frequencies up to kilohertz is presented. The combination of fast mechanical tilting and pore-filling of the porous silicon multilayer structure increases the tunable range to more than 200 nm or provides fine adjustment of working wavelength of the TOF. Experimental and optical simulation data for the visible and near-infrared wavelength range supporting the approach are shown. TOF are used in spectroscopic applications, e.g., for process analysis.
Keywords: Biosensor; Dual tunability; MEMS; MOEMS; Photonic crystal; Porous silicon; Silicon anodization; Tunable optical filter.