Investigation of III-V nanowires by plan-view transmission electron microscopy: InN case study

Microsc Microanal. 2014 Oct;20(5):1471-8. doi: 10.1017/S1431927614013038. Epub 2014 Aug 26.

Abstract

We discuss observations of InN nanowires (NWs) by plan-view high-resolution transmission electron microscopy (TEM). The main difficulties arise from suitable methods available for plan-view specimen preparation. We explore different approaches and find that the best results are obtained using a refined preparation method based on the conventional procedure for plan-view TEM of thin films, specifically modified for the NW morphology. The fundamental aspects of such a preparation are the initial mechanical stabilization of the NWs and the minimization of the ion-milling process after dimpling the samples until perforation. The combined analysis by plan-view and cross-sectional TEM of the NWs allows determination of the degree of strain relaxation and reveals the formation of an unintentional shell layer (2-3-nm thick) around the InN NWs. The shell layer is composed of bcc In2O3 nanocrystals with a preferred orientation with respect to the wurtzite InN: In2O3 [111] || InN [0001] and In2O3<110>||InN<1120>.

MeSH terms

  • Indium*
  • Microscopy, Electron, Transmission*
  • Nanowires / chemistry*
  • Nanowires / ultrastructure*

Substances

  • Indium
  • indium nitride