Three-dimensional photonic crystals created by single-step multi-directional plasma etching

Opt Express. 2014 Jul 14;22(14):17099-106. doi: 10.1364/OE.22.017099.

Abstract

We fabricate 3D photonic nanostructures by simultaneous multi-directional plasma etching. This simple and flexible method is enabled by controlling the ion-sheath in reactive-ion-etching equipment. We realize 3D photonic crystals on single-crystalline silicon wafers and show high reflectance (>95%) and low transmittance (<-15dB) at optical communication wavelengths, suggesting the formation of a complete photonic bandgap. Moreover, our method simply demonstrates Si-based 3D photonic crystals that show the photonic bandgap effect in a shorter wavelength range around 0.6 μm, where further fine structures are required.

Publication types

  • Research Support, Non-U.S. Gov't