Comparison between transient and frequency modulated excitation: application to silicon nitride and aluminum oxide coatings of silicon

Rev Sci Instrum. 2014 Jun;85(6):065105. doi: 10.1063/1.4880201.

Abstract

Contactless measurements of the lifetime of charge carriers are presented with varying ways of photo excitation: with and without bias light and pulsed and frequency modulated. These methods are applied to the study of the surface passivation of single crystalline silicon by a-SiN(x):H and Al2O3 coatings. The properties of these coatings are investigated under consideration of the merits of the different methods.