Reversed scan direction reduces electron beam damage in EBSD maps

Abstract

The deleterious effects of electron beam damage on high-resolution electron backscatter diffraction (EBSD) maps of undeformed quartz are significantly reduced by scanning in the direction opposite to that dictated by widely used EBSD acquisition software. Higher quality electron backscatter patterns are produced when the electron beam moves progressively down the sample (the apparent 'up' direction in the resulting maps) for all step sizes where beam damage affects EBSD map quality (≤ ∼0.4 μm in this study). The relative improvement associated with downward scanning increases as step size is reduced. A comparison of high-resolution maps made in experimentally deformed quartz demonstrates that downward scanning reduces by a factor of ∼2 the lower limit in step size relative to maps scanned in the conventional direction. The electron beam damages quartz at its point of entry, forming ∼0.1-μm diameter bumps visible in Scanning electron microscope (SEM) images. Downward scanning produces better results because it minimizes the flux of electrons through these loci of damaged crystal.

Keywords: Beam damage; EBSD; quartz.