Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications

Opt Express. 2014 Jun 2;22(11):13102-8. doi: 10.1364/OE.22.013102.

Abstract

Focused ion beam technology is combined with chemical etching of specifically designed fibers to create Fabry-Perot interferometers. Hydrofluoric acid is used to etch special fibers and create microwires with diameters of 15 μm. These microwires are then milled with a focused ion beam to create two different structures: an indented Fabry-Perot structure and a cantilever Fabry-Perot structure that are characterized in terms of temperature. The cantilever structure is also sensitive to vibrations and is capable of measuring frequencies in the range 1 Hz - 40 kHz.

Publication types

  • Research Support, Non-U.S. Gov't