A nano-stripe based sensor for temperature measurement at the submicrometer and nano scales

Small. 2014 Oct 15;10(19):3869-75. doi: 10.1002/smll.201303942. Epub 2014 May 30.

Abstract

Submicrometer dual-stripe temperature sensors made from a single piece of metal thin film (e.g., Pd) are developed. With the narrowest sensor being 900 nm in width, they show sensitivity of 1-2 μV/K for the full range of 10-300 K. The results confirm the size effect in Seebeck coefficient previously observed in microstripe sensors of the same device configuration.

Keywords: Seebeck coefficient; nanoscale; submicrometer; temperature sensors.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Biosensing Techniques*
  • Calibration
  • Cryopreservation
  • Light
  • Metals / chemistry
  • Microscopy, Electron, Scanning
  • Nanoparticles / chemistry*
  • Nanotechnology*
  • Optics and Photonics
  • Photochemistry
  • Temperature
  • Thermodynamics
  • Ultraviolet Rays

Substances

  • Metals