A compact microelectrode array chip with multiple measuring sites for electrochemical applications

Sensors (Basel). 2014 May 28;14(6):9505-21. doi: 10.3390/s140609505.

Abstract

In this paper we demonstrate the fabrication and electrochemical characterization of a microchip with 12 identical but individually addressable electrochemical measuring sites, each consisting of a set of interdigitated electrodes acting as a working electrode as well as two circular electrodes functioning as a counter and reference electrode in close proximity. The electrodes are made of gold on a silicon oxide substrate and are passivated by a silicon nitride membrane. A method for avoiding the creation of high edges at the electrodes (known as lift-off ears) is presented. The microchip design is highly symmetric to accommodate easy electronic integration and provides space for microfluidic inlets and outlets for integrated custom-made microfluidic systems on top.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electrochemical Techniques / instrumentation*
  • Equipment Design
  • Microelectrodes*
  • Microfluidic Analytical Techniques / instrumentation*
  • Microscopy, Atomic Force