Cost-effective atomic layer deposition synthesis of Pt nanotube arrays: application for high performance supercapacitor

Abstract

Due to the unique advantages of Pt, it plays an important role in fuel cells and microelectronics. Considering the fact that Pt is an expensive metal, a major challenging point nowadays is how to realize efficient utilization of Pt. In this paper, a cost-effective atomic layer deposition (ALD) process with a low N2 filling step is introduced for realizing well-defined Pt nanotube arrays in anodic alumina nano-porous templates. Compared to the conventional ALD growth of Pt, much fewer ALD cycles and a shorter precursor pulsing time are required, which originates from the low N2 filling step. To achieve similar Pt nanotubes, about half cycles and 10% Pt precursor pulsing time is needed using our ALD process. Meanwhile, the Pt nanotube array is explored as a current collector for supercapacitors based on core/shell Pt/MnO2 nanotubes. This nanotube-based electrode exhibits high gravimetric and areal specific capacitance (810 Fg(-1) and 75 mF cm(-2) at a scan rate of 5 mV s(-1) ) as well as an excellent rate capability (68% capacitance retention from 2 to 100 Ag(-1) ). Additionally, a negligible capacitance loss is observed after 8000 cycles of random charging-discharging from 2 to 100 Ag(-1) .

Keywords: Pt ALD; Pt nanotube arrays; core/shell Pt/MnO2 supercapacitor; pre-patterned alumina template.