Precise in situ atomic force microscopy (AFM) is used to monitor the formation of the solid electrolyte interphase (SEI) on Si electrodes. The stability of these passivation films on negative electrodes is critically important in rechargeable Li-ion batteries, and high capacity materials such as Si present substantial challenges because of the large volume changes that occur with Li insertion and removal. The results reported here show that the initial rapid SEI formation can be stabilized before significant Li insertion into the Si begins and that the rate at which this occurs varies significantly with the nature of the surface. The initial cycling conditions also have a substantial impact on the SEI that forms, with faster rates leading to a smoother, thinner SEI film. To quantitatively interpret the SEI measurements, irreversible expansion of the Si during the first cycle was also monitored in situ with specifically designed specimen configurations. On the basis of the experimental results, relatively simple models were also used to describe the initial formation and stabilization of the SEI and to describe the relationship between the SEI thickness and expected SEI degradation mechanisms.