Recording oscillations of sub-micron size cantilevers by extreme ultraviolet Fourier transform holography

Opt Express. 2014 Feb 24;22(4):4161-7. doi: 10.1364/OE.22.004161.

Abstract

We recorded the fast oscillation of sub-micron cantilevers using time-resolved extreme ultraviolet (EUV) Fourier transform holography. A tabletop capillary discharge EUV laser with a wavelength of 46.9 nm provided a large flux of coherent illumination that was split using a Fresnel zone plate to generate the object and the reference beams. The reference wave was produced by the first order focus while a central opening in the zone plate provided a direct illumination of the cantilevers. Single-shot holograms allowed for the composition of a movie featuring the fast oscillation. Three-dimensional displacements of the object were determined as well by numerical back-propagation, or "refocusing" of the electromagnetic fields during the reconstruction of a single hologram.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.