A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

Opt Express. 2014 Feb 10;22(3):2770-81. doi: 10.1364/OE.22.002770.

Abstract

We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.