Recovering low-turbidity cutting liquid from silicon slurry waste

Abstract

In order to recover a low-turbidity polyalkylene glycol (PAG) liquid from silicon slurry waste by sedimentation, temperatures were adjusted, and acetone, ethanol or water was used as a diluent. The experimental results show that the particles in the waste would aggregate and settle readily by using water as a diluent. This is because particle surfaces had lower surface potential value and weaker steric stabilization in PAG-water than in PAG-ethanol or PAG-acetone solutions. Therefore, water is the suggested diluent for recovering a low-turbidity PAG (<100 NTU) by sedimentation. After 50 wt.% water-assisted sedimentation for 21 days, the solid content of the upper liquid reduced to 0.122 g/L, and the turbidity decreased to 44 NTU. The obtained upper liquid was then vacuum-distillated to remove water. The final recovered PAG with 0.37 NTU had similar viscosity and density to the unused PAG and could be reused in the cutting process.

Keywords: Cutting liquid; Recovery; Sedimentation; Silicon slurry waste; Turbidity.