Experiments and identification of the unbalance of aerostatic guideways on the micro-scale

Dongju Chen; Yanhua Bian; Jinwei Fan

doi:10.3390/s140304416

Experiments and identification of the unbalance of aerostatic guideways on the micro-scale

Sensors (Basel). 2014 Mar 5;14(3):4416-27. doi: 10.3390/s140304416.

Authors

Dongju Chen¹, Yanhua Bian², Jinwei Fan³

Affiliations

¹ College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China. dongjuchen@gmail.com.
² College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China. bianyanhua@emails.bjut.edu.cn.
³ College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China. jwfan@bjut.edu.cn.

Abstract

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

Publication types

Research Support, Non-U.S. Gov't