Hydrogen negative ion production in a 14 GHz electron cyclotron resonance compact ion source with a cone-shaped magnetic filter

Rev Sci Instrum. 2014 Feb;85(2):02B132. doi: 10.1063/1.4860396.

Abstract

The plasma electrode structure of a 14 GHz ECR ion source was modified to enlarge the plasma volume of low electron temperature region. The result shows that the extracted beam current reached about 0.6 mA/cm(2) with about 40 W microwave power. To investigate the correlation between the volume of the low electron temperature region and the H(-) current, a vacuum ultraviolet (VUV) spectrometer had been installed to observe light emission in the VUV wavelength range from the plasma. From the results of the negative ion beam current and that from VUV spectrometry, production rate of vibrationally excited hydrogen molecule seems to be enhanced by increasing the volume of low electron temperature region.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Cyclotrons / instrumentation*
  • Electrodes
  • Electrons*
  • Hydrogen / chemistry*
  • Spectrophotometry, Ultraviolet
  • Vacuum

Substances

  • Hydrogen