Development status of the 18 GHz superconducting electron cyclotron resonance ion source at National Fusion Research Institute

H J You; S O Jang; W I Choo; Y H Jung; T H Lho; S J Yoo

doi:10.1063/1.4827307

Development status of the 18 GHz superconducting electron cyclotron resonance ion source at National Fusion Research Institute

Rev Sci Instrum. 2014 Feb;85(2):02A916. doi: 10.1063/1.4827307.

Authors

H J You¹, S O Jang¹, W I Choo¹, Y H Jung¹, T H Lho¹, S J Yoo¹

Affiliation

¹ Plasma Technology Research Center, National Fusion Research Institute, Gunsan, South Korea.

PMID: 24593495
DOI: 10.1063/1.4827307

Abstract

A new superconducting 18 GHz electron cyclotron resonance ion source is being developed at the National Fusion Research Institute in South Korea. This source will be dedicated for future application of highly charged ions in the area of matter interaction, diagnostic imaging, and probing. In this paper, we describe the status of the source development consisting of a double electrode biased disk, sputtering systems for metal ion production, diagnostic ports for the extraction region, a variable gap extraction-Einzel lens system, and a low energy beam transport system.