The surface topography and fractal properties of GexSb(As)40-xS50Te10 (x=10, 20, 27 at.%) films, evaporated onto glass substrates, have been studied by atomic force microscopic imaging at different scales. The surface of the chalcogenide films is smooth (<5 nm roughness), isotropic and having some particular differences in texture. All films are self-similar with Mean Fractal Dimension in the range of 2.25-2.63. The films with GexSb40-xS50Te10 composition are more uniform in terms of surface morphology (grains structure) than those with GexAs40-xS50Te10 composition for which the film surface exhibits a superimposed structure of large particles at x=10 and 20 at.%.
Keywords: Atomic force microscopy; Chalcogenide thin films; Fractal analysis; Surface topography.
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