Applicability of time-averaged holography for micro-electro-mechanical system performing non-linear oscillations

Paulius Palevicius; Minvydas Ragulskis; Arvydas Palevicius; Vytautas Ostasevicius

doi:10.3390/s140101805

Applicability of time-averaged holography for micro-electro-mechanical system performing non-linear oscillations

Sensors (Basel). 2014 Jan 21;14(1):1805-21. doi: 10.3390/s140101805.

Authors

Paulius Palevicius¹, Minvydas Ragulskis², Arvydas Palevicius³, Vytautas Ostasevicius⁴

Affiliations

¹ Department of Mathematical Research in Systems, Kaunas University of Technology, Studentu st. 50-222, Kaunas LT-51368, Lithuania. paulius.palevicius@ktu.lt.
² Department of Mathematical Research in Systems, Kaunas University of Technology, Studentu st. 50-222, Kaunas LT-51368, Lithuania. minvydas.ragulskis@ktu.lt.
³ Faculty of Mechanical Engineering and Mechatronics, Kaunas University of Technology, Kestucio St. 27, Kaunas LT-44312, Lithuania. arvydas.palevicius@ktu.lt.
⁴ Institute for Hi-Tech Development, Faculty of Mechanical Engineering and Mechatronics, Kaunas University of Technology, Student St. 65, Kaunas LT-51368, Lithuania. vytautas.ostasevicius@ktu.lt.

Abstract

Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms.

Publication types

Research Support, Non-U.S. Gov't

MeSH terms

Holography / methods*
Humans
Micro-Electrical-Mechanical Systems*
Motion