Large arrays and properties of 3-terminal graphene nanoelectromechanical switches

Abstract

Large arrays of 3-terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non-linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.

Keywords: finite element analysis; graphene; microsystems; nanoelectromechanical systems; nanomechanical switches.