Height drift correction in non-raster atomic force microscopy

Abstract

We propose a novel method to detect and correct drift in non-raster scanning probe microscopy. In conventional raster scanning drift is usually corrected by subtracting a fitted polynomial from each scan line, but sample tilt or large topographic features can result in severe artifacts. Our method uses self-intersecting scan paths to distinguish drift from topographic features. Observing the height differences when passing the same position at different times enables the reconstruction of a continuous function of drift. We show that a small number of self-intersections is adequate for automatic and reliable drift correction. Additionally, we introduce a fitness function which provides a quantitative measure of drift correctability for any arbitrary scan shape.

Keywords: Atomic force microscopy; Drift correction; Non-raster scan; Self-intersecting scan.