Calculation of the performance of magnetic lenses with limited machining precision

O Sháněl; J Zlámal; M Oral

doi:10.1016/j.ultramic.2013.10.004

Calculation of the performance of magnetic lenses with limited machining precision

Ultramicroscopy. 2014 Feb:137:1-6. doi: 10.1016/j.ultramic.2013.10.004. Epub 2013 Oct 17.

Authors

O Sháněl¹, J Zlámal², M Oral³

Affiliations

¹ FEI Czech Republic s.r.o., Podnikatelská 6, 61200 Brno, Czech Republic; Institute of Physical Engineering, Brno University of Technology, Technická 2, Brno 616 69, Czech Republic. Electronic address: ondrej.shanel@fei.com.
² Institute of Physical Engineering, Brno University of Technology, Technická 2, Brno 616 69, Czech Republic; CEITEC BUT, Technická 10, 616 69 Brno, Czech Republic.
³ Institute of Scientific Instruments of the ASCR, v.v.i., Královopolská 147, 61264 Brno, Czech Republic.

PMID: 24220249
DOI: 10.1016/j.ultramic.2013.10.004

Abstract

To meet a required STEM resolution, the mechanical precision of the pole pieces of a magnetic lens needs to be determined. A tolerancing plugin in the EOD software is used to determine a configuration which both meets the optical specifications and is cost effective under the constraints of current manufacturing technologies together with a suitable combination of correction elements.

Keywords: Aberrations; Perturbed geometry; Saturated magnetic lens; Spot size; Tolerance analysis.

Publication types

Research Support, Non-U.S. Gov't