Displacement measurement using a wavelength-phase-shifting grating interferometer

Opt Express. 2013 Oct 21;21(21):25553-64. doi: 10.1364/OE.21.025553.

Abstract

A grating interferometer based on the wavelength-modulated phase-shifting method for displacement measurements is proposed. A laser beam with sequential phase shifting can be accomplished using a wavelength-modulated light passing through an unequal-path-length optical configuration. The optical phase of the moving grating is measured by the wavelength-modulated phase-shifting technique and the proposed time-domain quadrature detection method. The displacement of the grating is determined by the grating interferometry theorem with the measured phase variation. Experimental results reveal that the proposed method can detect a displacement up to a large distance of 1 mm and displacement variation down to the nanometer range.

Publication types

  • Research Support, Non-U.S. Gov't