The purpose of this study is to investigate the cell attachment and viability on the micro-arc oxidization (MAO) microwave/hydrothermal treated titanium surfaces. The MAO samples were microwave irradiated in vessels containing 50 mL of double-distilled water for 30 minutes (MWDD). The immersion solution consisted of 0.05 mM calcium hydroxide and 0.03 mM ammonium dihydrogen phosphate (MWCP), and same solution with the pH value adjusted to 9.6 (MWCP9.6) were compared. The hydrothermal (HT) samples were conducted under DD water at 250°C for 3 hr. The cell viability (WST assay) results show that there was no significant different on the cell viability at 4 hrs. After cultured for 1 day, the cell viability of MG63 cells on the samples from high to low is HT = MWDD = MWCP > MWCP9.6 > MAO. No significant different was found on the cell number between groups. However, the percentages of spreading cells to total adherent cells are higher on the MWDD, MWCP, and MWCP9.6 groups (75.7%, 69.9%, 69.4%, respectively), when compare to MAO and HT groups (48.4% and 41.5%). These results demonstrate that increased cell spreading on a MW groups with submicro-to- nano scale calcium phosphates on titania produced by microwave/hydrothermal process.