Fabrication of a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers

Yongbin Zeng; Yufeng Wang; Ningsong Qu; Di Zhu

doi:10.1063/1.4822113

Fabrication of a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers

Rev Sci Instrum. 2013 Sep;84(9):095006. doi: 10.1063/1.4822113.

Authors

Yongbin Zeng¹, Yufeng Wang, Ningsong Qu, Di Zhu

Affiliation

¹ Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics (NUAA), Nanjing 210016, China.

PMID: 24089857
DOI: 10.1063/1.4822113

Abstract

This paper describes a method for preparing a high-aspect-ratio sub-micron tool using a cathode coated with stretched-out insulating layers and a straight reciprocating motion applied at the anode via the liquid membrane electrochemical machining (ECM). Simulation results indicate that the application of a cathode coated with stretched-out insulating layers is beneficial for the localization of ECM. Moreover, a mathematical model was derived to estimate the final average diameter of the fabricated tools. Experiments were conducted to verify the versatility and feasibility of the proposed method and its mathematical model. It was observed that the calculated and the experimental results are in good agreement with each other. A sub-micron tool with an average diameter 140.8 nm and an aspect ratio up to 50 was fabricated using the proposed method.