3D nano-structures for laser nano-manipulation

Beilstein J Nanotechnol. 2013 Sep 17:4:534-41. doi: 10.3762/bjnano.4.62. eCollection 2013.

Abstract

The resputtering of gold films from nano-holes defined in a sacrificial PMMA mask, which was made by electron beam lithography, was carried out with a dry plasma etching tool in order to form well-like structures with a high aspect ratio (height/width ≈ 3-4) at the rims of the nano-holes. The extraordinary transmission through the patterns of such nano-wells was investigated experimentally and numerically. By doing numerical simulations of 50-nm and 100-nm diameter polystyrene beads in water and air, we show the potential of such patterns for self-induced back-action (SIBA) trapping. The best trapping conditions were found to be a trapping force of 2 pN/W/μm(2) (numerical result) exerted on a 50-nm diameter bead in water. The simulations were based on the analytical Lorentz force model.

Keywords: extraordinary transmission; near field; optical tweezing; plasmonics; reactive ion etching; self-induced back-action.